SIERRA Thermal Mass Flow controllers

SIERRA Instruments offers a wide variety of thermal mass flow controllers. The low-Flow line covers flow rates from 0.05 - 1000 nl/min and offers products for high-Accuracy Applications as well as economical solutions for industrial meterruns.

Read more about the thermal mass flow metering principles in our technologies section.

Digital high performance, stainless steel with Dial-A-Gas® Technology & computer control. Flow ranges from 0 to 15 sccm to 0 to 1000 slpm.

Flow Rates: 0 -15 sccm to 0 - 1000 slpm. Max. Pressure: 34 bar Temp.: 0-50°C Accuracy: +/- 0.5% of full scale Materials: 316 stainless steel construction Flow ranges: from 0 to 10 sccm to 0-1000 slpm Fast-response control valve. True digital performance with great flexibility “Primary Standard” calibration NIST traceability Dial-A-Gas® Technology 10 pre-programmed gases come standard Substitute up to 9 gases of your own

control functions also available from PC via RS-232 Traditional analog control also included 4-20 mA 0-5 Vdc 0-10 Vdc 1-5 Vdc Source code for RS-232 communication provided Profibus DP Multi-drop RS-485/MODBUS RTU (Using Compod) Small footprint makes drop-in replacement easy Single-sided 24 Vdc power supply CE approval

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Specifically designed for flow ranges under 4 sccm (smlm) with a minimum controllable mass flow rate of 0.1 sccm (smlm). Also get digital high performance, stainless steel construction with Dial-A-Gas® Technology & computer control.

Flow Rates: 0.1-4 scm³ Max. Pressure: 34 bar Temp.: 0-50°C Accuracy: of +/- 1.0% of full scale Repeatability: of +/- 0.2% of full scale Materials: 316 Stainless steel construction Connections: VCO, VCR Capillary Thermal Technology Digital performance with maximum flexibility Primary Standard calibration and NIST traceability Dial-A-Gas Technology—10 preprogrammed gases or select your own Pilot Module allows display and control of all neccessary controlfunctions

All functions also available via RS-232 Profibus DP Multi-drop RS-485/MODBUS RTU (Using Compod) Traditional analog controls and outputs also included: 4-20 mA 0-5 VDC 1-5 VDC 0-10 VDC Small footprint makes installation easy 24 VDC power supply CE approval

For more detailed information visit SIERRA's Product Description

Industry’s only NEMA 6/IP67 truly industrial MFC; Available as heavy industrial flanged version; Accuracy of +/- 1% of Full Scale and flow ranges from 0 to 10 SLPM to 0 to 1000 SLPM

Industry's only NEMA 6/IP67 industrial MFC provides wash down protection eliminating secondary enclosures Measure & control gas mass flow rates up to 1000 SLPM - Sierra offers other models up to 100,000 slpm & higher (meters only) Accuracy: +/- 1% of Full Scale Repeatability: +/- 0.2% Full Scale ensures a stable process even under changing conditions Dial-A-Gas® lets you select from up to 10 gases in one instrument, creating great flexibility and reducing spares inventories Operation at low differential pressures possible due to powerful valve design Both digital and analog communication included Multi-drop RS-485/MODBUS RTU

All stainless steel construction is suitable for any clean gas, even corrosives & toxics Single sided power (24 VDC) reduces installation cost View and change the following functions in the field via RS-232 or our unique Pilot Module: Gas type Setpoint value Setpoint source Engineering units Output signal Valve state (open, closed or automatic) Full scale value Zero Value Span Value

For more detailed information visit SIERRA's Product Description

Industry’s only NEMA 6/IP67 truly industrial MFC; Also available as heavy industrial flanged version; Accuracy of +/- 1% of Full Scale and flow ranges from 0 to 10 SLPM to 0 to 1000 SLPM

Flow-ranges: 0-1000 SLPM Max. Pressure: 34 bar Temp.: 0-50 °C Accuracy: +/- 1% of Full Scale Repeatability: +/- 0.2% Full Scale ensures a stable process even under changing conditions Connections: VCO, VCR, Compression fitting, Flange Industry's only NEMA 6/IP67 industrial MFC provides wash down protection eliminating secondary enclosures Capillary Thermal Technology Dial-A-Gas® lets you select from up to 10 gases in one instrument, creating great flexibility and reducing spares inventories

Operation at low differential pressures possible due to powerful valve design Both digital and analog communication included Multi-drop RS-485/MODBUS RTU All stainless steel construction is suitable for any clean gas, even corrosives & toxics Single sided power (24 VDC) reduces installation cost View and change critical control functions in the field via RS-232 or our unique Pilot Module

For more detailed information visit SIERRA's Product Description

Economic mass flow controller for OM and other applications, using the technology of the series 100 where the features of this high-end series are not needed; Constructed from your choice of 316SS or aluminum; Accuracy of +/- 1.5% of full scale and flow ranges from 0-10 sccm to 0-200 slpm, RS-232, RS-485, small footprint, CE approved.

Flow Range: 0-10 sccm up to 200 slpm (nlpm) range, compact footprint Max. Pressure: 10 bar Temp.: 0-50°C Accuracy: +/- 1.5% of Full Scale Repeatability: +/- 0.25% of Full Scale Connections: VCO, VCR, Compression fitting Materials: 316L SS or Aluminum (Medium flow 0-200 slpm unit only in Aluminum)  Response Time: Fast 300ms valve time constant  Field Calibration: Field zero, span, adjust Interface/Communications: Large local display or free user software; 4-20mA, 0-5 Vdc, RS-232, RS-485 (addressable) Gas: All clean gases Approvals: CE

Capillary Thermal Technology Off the shelf delivery on seven common in-stock flow rates Easy setup, field calibrate without sending units back to factory Add communications, displays or future functionality as needed Competitive pricing and volume discounting Free engineering for basic customization

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With its advanced mass air flow sensor capabilities, the Compod™, coupled with Sierra’s Smart-Trak® 2 Model 100 mass flow meters (MFM’s) or controllers (MFC’s) greatly simplifies flow control systems and permits networking of multiple instruments using open-source MODBUS RTU protocol. Compod™ also monitors the functionality of the mass flow meter or controller and includes diagnostics, notifying users of valve faults or system upsets. By adding the Compod™ flow control module to a new or existing Smart-Trak® MFM or MFC, end users can take complete control. Two digital outputs and one analog input can be configured by the user for a wide variety of process controls including:

• Gas mixing and blending
• Batch control
• Sensor driven leak testing
• Process monitoring
• Physical Vapor Deposition (Sputtering)
• Pressure monitoring and control
• Gas ratio control
• Internal valve performance monitoring
• Triggering alarms
• Starting or stopping gas flows automatically under user-defined conditions
• Gas flow totalization with adjustable pulse output
• And many more...

For more detailed information visit SIERRA's Product Description